具有在片稳定网络的GaAs HBT微波功率管

采用GaAs标准MMIC工艺制作了具有片上RC并联稳定网络的InGaP/GaAs HBT微波功率管单胞. 依据K稳定因子,RC网络使功率管在较宽的频带内具有绝对稳定特性. Load-pull测试表明RC网络没有严重影响功率管的大信号特性,在5.4GHz饱和输出功率为30dBm,在11GHz 1dB压缩点输出功率大于21

第!"卷!第#!期!$$%年#!月

半!导!体!学!报

&'()*+*,-./)01-2+*3(&-)4.&5-/+

6789!"!)79#!

!4:;9!$$%

H;%8=:I,>156F;J046F05I5;28>8365F>3?"29&?>@

!3;C>A>K;3>62L03F65M

A

!+!R!1&E:GfCGEFE:G'FCFG!gCGDCGOCD:,DD<DG!1DF\DGF!CGLgF4:PDGZH\c

"78@$?$A$15?>&51=1>$&58?>@!C"?81@1D>0:1B/>?18>1@!E1??8$$$!?!C"?80$6G*56F9!#

#0)%C835;13G(GRCURC0M'<5BD;K7YCV:X7Y:KOKCGMDMO7KYDOE7GN;EDCKC88:8/&MOCWD8DJCOD7GG:OY7KeDML:NXX

OE:L:VD;:ME7YMFG;7GLDOD7GC8MOCWD8DOV:87:LYDOECMOCGLCKLRC0M33(&XK7;:MM92K7BOE:MOCWD8DOC;O7K2!cXcT

DGCYDL:TK:F:G;CG:LF:O7OE:/&G:OY7Ke95E:X7Y:K;ECKC;O:KDMOD;M7TOE:L:VD;:CMB:CMFK:LW87CLNIcKHcCF88MMO:BME7YOECOOE:8CK:NMDGC8:KT7KBCG;:7TOE:X7Y:KOKCGMDMO7KDMCTT:;O:LM8DEO8OE:/&G:OY7Ke9XcHHXHcWc

!HMM=$L<BCO@9SR'JCGLH#M8CK:KOECG!#Q%L<BCO##R'J95E:MOCWD8DOTOE:L:VD;:LF:O7/&G:ONCODL<DHc7

Y7KeDMXK7V:LW7Y:K;7BWDGCOD7G;DK;FDO95EDMBCe:MOE:X7Y:KOKCGMDMO7KV:KFDOCW8:T7KC8D;COD7GMDGcCXcMXXBD;K7YCV:EDEX7Y:K'<5CB8DTD:KM9HX#'%D065<8<5%BD;K7YCV:X7Y:KOKCGMDMO7KMOCWD8DOEFc

%!$$%&&#!@%$,@"$<#5#0!!!%"$&N&2BOC05)S=#!!!G61BO02316<053>1A0#G#$!@=NS#""!$$%#!N!$"@N$@

'#2356<B13>62!

'DEN7Y:KCB8DTD:KM"'U0$ECV:W::GL:NHXX

V:87:LFMDGLVCG;:LM:BD;7GLF;O7KXK7;:MM:MXHCMF;ECMRC0M2*57K'<5O:;EG7879'U0MECV:HcBF8OD8:MOC:MCGL8CK:X:KDE:KDOEX7Y:KXHHXcY;7BWDGCOD7GDG7KL:KO7K:C8DJ:EDEX7Y:KCGLH

'!(

EDEHCDG#!95E:TO:GY7KeFGL:KCEDEWDCMHc7HCGLMOK7G87G8DG:CKMOCO:95E:M:TC;O7KMBCe:HcG7Y:KOKCGMDMO7KMV:KK7G:O7H:G:KCO:LDV:KMDNXcXTD:LXCKCMDOD;7M;D88COD7GMLF:O7OE:XK:M:G;:7TC

'!!=(

BF8OD8:G7G8DG:CKT::LWC;e8775E:X7KOXX9DB:LCG;:VCKDCOD7G7TOE:OKCGMDMO7KMLF:O7OE:KNXBC8LDMMDCOD7G;CGC8M7WKDGGMOCWD8DO9(G7KL:KXHDc

!O7L:MDGCG'U0MF;;:MMTF88OE:L:MDG:KBFMOHcH*COO:GOD7GO7OE:L:VD;:MMOCWD8DOGLFM:CGcCXcC

:TT:;ODV:MOKF;OFK:O7K:MOKCDGOE:7M;D88COD7G927KEDEN7Y:K33(&CB8DTD:KL:MDG!OE:X7Y:KHXXH

!OKCGMDMO7KMOE:BCO;EDG:OY7Ke!CGLOE:WDCMHG

;DK;FDOCK:DGO:KCO:L7GO7CMFWMOKCO:YDOEV:KHc

!MBC88MDJ:95E:G!DTOE:OKCGMDMO7KM7M;D88CO:DODM

LDTTD;F8OO7L:WFE:7M;D88COD7GYDOEDGOE:HO

'S(

;ED5E:K:T7K:OE:MOCWD8DO:MDG7TX7Y:KX9cLHOKCGMDMO7KMDMBF;EB7K:DB7KOCGOT7K33(&L:NX

!)MDG9(GOEDMXC:KCG(GRCURC0M'<5BD;K7NHX

YCV:X7Y:KOKCGMDMO7KYDOE7GN;ED&MOCWD8DJCNX/OD7GG:OY7KeDML:V:87:L95E:/&G:OY7KeDMCNX

#A&7KK:M7GLDGFOE7K9*BCD8;E"#S!M7EF9;7BXHCc

:;:DV:L=#,F8$$%!K:VDM:LBCGFM;KDOK:;:DV:L#%0FFMO!$$%!/c!XH

L7O:LO7DBK7V:OE:MOCWD8DOTOE:L:VD;:95E:XXc7

:TT:;O7TOE:/&G:OY7KeT7KOE:'<5L:VD;:*MMOCWD8DOGLX7Y:K;ECKC;O:KDMOD;MCK::VC8FCO:LcCCGL;7BCK:LO7CL:VD;:YDOEG7/&G:OY7Ke9X5E:MOCWD8DOTOE:L:VD;:DMXK7V:LWCGLc7cC&WOY7N;:88X7Y:K;7BWDGCOD7G;DK;FDO9

(!H;%8=:I@6F0535;28>8365F>3?

/&83;C>A>303F65ME2

()'!!3;C>A>32;A8>86P3?0<0J>10F>3?/&2039E;EF65M!:G7M;D88COD7G7;;FKMOE:X7KOK:T8:;OD7G!!gE

;7:TTD;D:GO7TOE:X7Y:KOKCGMDMO7KDM8CK:KOECGH#!CGLOE:G:CODV:K:MDMO7KOCe:M:TT:;O90G:TT:;NHODV:MOKF;OFK:BFMOOE:GW:FM:LO77TTM:OOE:G:NHCODV:K:MDMO7K7TOE:X7Y:KOKCGMDMO7KCGL:8DBDNGCO:OE:7M;D88COD7G95E:K:MDMO7K7TOE:/&G:ONY7Ke;CG7TTM:OOE:G:CODV:K:MDMO7KDGOE:OKCGNH

!MDMO7KOE:K:WFK:MMDGGM;D88COD7GM90OcMXXHCc7EDETK:F:G;D:MOE:K:C;OCG;:7TOE:;7F8:;CNHIXC;DO7KW:;7B:M87YCGL;7B:GMCO:MOE:COO:GFCNXXOD7G7TOE:X7Y:KHCDGLF:O7OE:K:MDMO7K95EFMC7Y:KOKCGMDMO7KYDOECXCKC88:8/&G:OY7Ke;CGXC;ED:V:FG;7GLDOD7GC8MOCWD8DOGCYDL:KCG:7TcDHTK:F:G;D:MTK7BM:V:KC8EFGLK:L3'JO7M:V:KC8I

!R'J9(GXCKOD;F8CKCG/&G:OY7Ke;CGK:MOKCDG

$$%&EDG:M:(GMODOFO:7T*8:;OK7GD;M"!

采用GaAs标准MMIC工艺制作了具有片上RC并联稳定网络的InGaP/GaAs HBT微波功率管单胞. 依据K稳定因子,RC网络使功率管在较宽的频带内具有绝对稳定特性. Load-pull测试表明RC网络没有严重影响功率管的大信号特性,在5.4GHz饱和输出功率为30dBm,在11GHz 1dB压缩点输出功率大于21

"#)*

半!导!体!学!报第!"卷

OE:7M;D88COD7GOECODMK:8CODV:O7OE:TK:IF:G;c

!DGNX

FOX7Y:K8:V:8!CGLOE:4&WDCM7TOE:OKCGNMDMO7K'%!"(

9

5E::TT:;O7TOE:/&G:OY7Ke7GOE:L:VD;:*M

MOCWD8DOc;CGW:MDBX8c:VC8FCO:LWcCMOCWD8DOc

TC;NO7K2CGL87CL7KM7FK;:MOCWD8DOc;

DK;8:92DM;C8N;F8CO:LTK7BMBC88MDH

GC8/XCKCB:O:KLCOC!YED;E;CGW:B:CMFK:LT7KOE:X7Y:KL:VD;:YDOECG:ON

Y7KeCGC8cJ:K95E::I

FCOD7GDMCMT7887YM'>(

#2(

!!"""""

"I/!!"/"!I

"(/!!/""'/!"/"!

gE:G2DM8CKH:KOECG#!OE:L:VD;:DMFG;7GLDNOD7GC88cMOCW8:95E:87CLMOCWD8DOc;

DK;8:7TLDTT:KN:GOTK:I

F:G;D:M;CGW:LKCYGWCM:L7GOE:/XCNKCB:O:KWcC

G*40O778!CGLH:G:KC88cOE:MOCW8:CK:CDM7FOMDL:7TOE:;DK;8:7GOE:+BDOE;ECKO

YE:G/##%

#'?(9R:G:KC88c!CG/&G:OY7KeDMX8C;:LCOOE:DGNXFO7TOE:X7Y:KOKCGMDMO7KDG7KL:KO7:8DBDGCO:OE::TT:;O7G7FOXFOX7Y:K8:V:895E:VC8F:7TJME7F8LBCe:2CW7V:#DGCYDL:TK:IF:G;cKCGH:CGLW:CMMBC88CMX7MMDW8:9CDMM:8:;O:LWcO

E:7X:KCOD7GC8TK:IF:G;c7

TOE:OKCGMDMO7K90MCKF8:!OE:;CXC;DODV:K:C;OCG;:DM:IFC8O7OE:K:MDMOCG;:JCOOE:87Y:GL7TOE:7X:KCOD7GC8TK:IF:G;c

KCGH:'%

(9()(!G0J>10P;C5>1;3>62

5E:L:V:87X:LRC0M'<5X7Y:KOKCGMDMO7KYDOE/&MOCWD8DJCOD7GG:OY7KeDMME7YGDG2DH9#95E:RC0M'<5:XDOCPDC8YCT:KHK7YGWc3<*YCMXK7VDL:LWcOE:+ECGHECD(GMODOFO:7T3D;KN7McMO:BCGL(GT7KBCOD7G5:;EG787Hc7TOE:&EDNG:M:0;CL:Bc7T+;D:G;:M95E:X7Y:KOKCGMDMO7K;:88DM;7BX7M:L7TO:G!]=$:BDOO:KTDGH

:KMCGLDMBCGFTC;OFK:LFMDGHCM:8TNC8DHGB:GOXK7;:MM'@(

DGOE:#$$BB;7BX7FGLM:BD;7GLF;O7KXK7;:MM8DG:7T(3*&0+95E:/&G:OY7KeDG;8FL:MC@$$52/CGL$Q>X23(3;CXC;DO7KCGLDM …… 此处隐藏：9765字，全部文档内容请下载后查看。喜欢就下载吧 ……